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用直流等离子体化学气相沉积法沉积TiC、TiN、Ti(CN)以及钛的复合涂层。对在高速钢和硅基体上所得的各种钛化合物膜做了晶体结构分析、表面形貌分析、断口结构分析和显微硬度分析等。试验表明:在沉积温度600℃左右,所得的多种Ti(CN)涂层有很高的显微硬度和良好的粘接力。这些涂层有的是由TiC和TiN两种晶体组成,有的是由TiC、TiN和Ti(CN)三种晶体组成。部分Ti(CN)的结构非常细密,是由多种晶体组成的混合物。
Deposition of TiC, TiN, Ti (CN) and Titanium Composite Coatings by DC Plasma Chemical Vapor Deposition. On the high-speed steel and silicon substrate obtained on the various titanium compound film crystal structure analysis, surface morphology analysis, fracture structure analysis and microhardness analysis. The results show that the obtained Ti (CN) coatings have high microhardness and good adhesion at a deposition temperature of about 600 ℃. Some of these coatings are composed of two kinds of TiC and TiN crystals, some of them consist of three kinds of TiC, TiN and Ti (CN) crystals. Part of the structure of Ti (CN) is very fine, is a mixture of a variety of crystals.