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设计了一种用于MEMS陀螺敏感模态的六阶连续带通多反馈∑ΔM闭环控制系统,以及相应的系统参数多目标优化方法.与以往的低通∑△M闭环控制系统相比,该系统不仅具有更好的噪声整形特征,能较大程度抑制陀螺噪声,而且易于在PCB电路上实现.由于整个闭环系统非常复杂且非线度较高,采用遗传算法对系统参数进行了多目标优化.系统优化之后的仿真结果显示,当输入角速度为200°/s时,在64 Hz带宽范围内陀螺信号的信噪比可大于90 dB,底噪为-120 dBV/(Hz)~(1/2).最后采用常压封装的z轴全对称解耦结构的绝缘体上硅陀螺在PCB电路上进行了系统功能验证,测试结果显示系统具有明显的带通噪声整形特征,陀螺底噪为-100 dBV/(Hz)~(1/2).
A six-order continuous bandpass multi-feedback ΣΔM closed-loop control system for MEMS gyro-sensitive mode is designed and the corresponding multi-objective optimization method of system parameters is designed.Compared with the conventional low-pass ΣΔM closed-loop control system The system not only has better noise shaping characteristics, can restrain the gyro noise to a great extent, but also can be easily implemented on the PCB circuit.Because the closed-loop system is very complex and has high nonlinearity, the genetic algorithm is used to optimize the system parameters The simulation results after system optimization show that the signal to noise ratio of the gyro signal can be greater than 90 dB and the noise floor is -120 dBV / (Hz) at 64 Hz when the input angular velocity is 200 ° / 2) .At last, a silicon-on-insulator (SOI) silicon gyroscope with symmetric decoupled z-axis symmetric structure is tested on a PCB circuit. The test results show that the system has significant band-pass noise shaping characteristics. The gyro noise floor is -100 dBV / (Hz) ~ (1/2).