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用真空蒸发和自然氧化法在玻璃基底上制备了Ti/TiO2多层膜,并检测了薄膜的光电性能。电性能检测表明Ti/TiO2多层膜存在类负阻效应,多层膜的层间的类负阻效应比表面的更明显,薄膜的层间电阻率高于表面电阻率;用分光光度计测得试样退火前后的透射谱;用X射线衍射仪和扫描电镜检测了Ti/TiO2多层膜的晶体结构和表面形貌。
Ti / TiO2 multilayer films were prepared on glass substrate by vacuum evaporation and natural oxidation, and the photoelectric properties of the films were tested. The electrical properties of Ti / TiO2 multilayers show that the negative resistance effect of Ti / TiO2 multilayers is more obvious than that of the surface, and the interlaminar resistivity of the films is higher than that of the surface resistivity. The transmission spectra of Ti / TiO2 multilayer films were obtained by X-ray diffraction and scanning electron microscopy. The crystal structure and surface morphology of Ti / TiO2 multilayer films were observed.