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日本信号株式会社推出了基于微机电系统(MEMS)技术的超小型六轴力觉传感器。其采用该公司研发的电磁驱动式MEMS光扫描仪“ECO SCAN”的技术经验,主要用于机器人和计量测量仪器领域。该六轴力觉传感器利用半导体的压电电阻效应来检测应力。其直径为10.6mm、厚14.5mm。其沿X、Y、Z轴方向的额定载荷各为±30N,沿各轴旋转方向的额定载荷为±30Ncm,重复精度优于3%,其轴向检测灵敏度为0.1mV/N~0.2mV/N,X、Y轴旋转方向的
Nippon Signal Co., Ltd. introduced ultra-small six-axis force sensor based on micro-electromechanical system (MEMS) technology. The company uses the company’s research and development of electromagnetically driven MEMS optical scanner “ECO SCAN” technical experience, mainly for the field of robots and metrology instruments. The six-axis force sensor utilizes the piezoresistance effect of a semiconductor to detect stress. Its diameter is 10.6mm, thickness 14.5mm. Its rated load in the X, Y and Z directions is ± 30N each, rated load in each direction is ± 30Ncm, repeatability is better than 3%, its axial detection sensitivity is 0.1mV / N ~ 0.2mV / N, X, Y direction of rotation