用光学光谱分析仪测量了ＸｅＣｌ准分子激光在ＹＢａ_２Ｃｕ_３Ｏ_７－ｘ超导靶面激励等离子体发射谱的轴向和径向分布，并由等离子体发射谱的径向分布拟合得到等离子体中激发态粒子的角分布．结果表明激光等离子体呈现ｃｏｓθ分布，ｎ值范围为２．７８到７．６３之间，且随激光能量密度和背景氧压增大而增大．离子的ｎ值明显高于原子的ｎ值． The axial and radial distributions of emission spectra of XeCl excimer laser on YBa 2 Cu 3 O 7-x superconducting target were measured by optical spectrum analyzer. The excited state of the plasma was obtained from the radial distribution of the plasma emission spectrum Particle angular distribution. The results show that the laser plasma exhibits a cosθ distribution with n values ​​ranging from 2.78 to 7.63 and increases with increasing laser fluence and background oxygen pressure. The n value of the ion is significantly higher than the n value of the atom.