本文采用高温高压下固态复分解反应法生长氮化镓。用X射线衍射仪、扫描电子显微镜、激光拉曼光谱仪对其进行分析,结果表明生成了六角纤锌矿结构的氮化镓晶体。该样品在宏观上受到了张应力的作用,退火后,宏观的应变状态由张应变向压应变转变;晶体微观应力减小,晶粒尺寸变大,晶体质量变好。 In this paper, high temperature and high pressure solid state metathesis reaction growth of gallium nitride. The results of X-ray diffraction, scanning electron microscopy and laser Raman spectroscopy showed that hexagonal wurtzite gallium nitride crystals were formed. After annealing, the macroscopic strain state changes from tensile strain to compressive strain. The microscopic stress decreases, the grain size becomes larger and the crystal quality becomes better.