LiNbO_3波导开关阵列是一种可用于光子交换系统中的全封装、带尾纤的4×4集成光开关阵列,它选择了BOA型波导开关作为开关阵列的单元,由六个单元集成构成光开关阵列。在工艺上解决了低损Ti、LiNbO_3,波导的制作;用高纯Al_2O_3作缓冲层,增厚铬——金电极,完成了低损耗的光纤—波导的耦合。该集成光开关阵列具有插入损耗低、开关速度高、驱动电压低、有 LiNbO_3 waveguide switch array is a fully packaged, pigtailed 4 × 4 integrated optical switch array that can be used in the photonic exchange system. It chooses the BOA type waveguide switch as the unit of the switch array, which consists of six units and integrates the optical switch Array. In the process, low-loss Ti, LiNbO_3 and waveguide were fabricated. The high-purity Al_2O_3 buffer layer was used to thicken the chrome-gold electrode to complete the low-loss fiber-waveguide coupling. The integrated optical switch array with low insertion loss, high switching speed, low drive voltage, there