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在沈阳仪器仪表工艺研究所科研成果的基础上,营口仪表元件一厂于一九七九年试制出YC-200型扩散硅固态压力传感器。经过现场运行及有关单位的技术鉴定,该传感器性能稳定,综合精度达0.1％以上,可以组织小批量生产。这种传感器是利用半导体的压阻效应,在N型单晶硅膜片上,采用集成电路工艺沿一定的晶向制成四个P型电阻,接成桥路。因此,具有灵敏度高、稳定性及可靠性好、体积小重量轻等特点。可用于非腐蚀性气体、液体的压力或差压测量,并可配合显示及调节仪表,进
On the basis of the scientific research achievements of Shenyang Institute of Instrumentation and Technology, Yingkou Instrument Component Factory made trial production of YC-200 diffused silicon solid-state pressure sensor in 1979. After field operation and the technical appraisal of relevant units, the sensor has stable performance and comprehensive accuracy of 0.1% or more, which can be used to produce small batch production. This sensor is the use of semiconductor piezoresistive effect, the N-type single-crystal silicon film, the use of integrated circuit technology along a certain direction to make four P-type resistance, then into a bridge. Therefore, with high sensitivity, stability and reliability, small size and light weight and so on. Can be used for non-corrosive gas, liquid pressure or differential pressure measurement, and with the display and adjustment instruments, into