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大日本荧光屏制造公司研制出一种用分光薄膜干涉色的方法测定厚度的光学膜厚仪。该装置的分光部分采用平面成像型全息凹面衍射光栅,探测部分采用一维电荷耦合器件图像传感器,可在全波段同时测定。这种结构与众不同(见图)。
Dainippon Screen Co., Ltd. has developed an optical thickness gauge that measures the thickness using a spectroscopic film interference color method. The device uses a planar imaging holographic concave diffraction grating part of the device, the detection part of the one-dimensional charge-coupled device image sensor can be simultaneously measured in the full band. This structure is different (see figure).