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利用调Q Nd…YAG激光器输出的1064nm纳秒脉冲激光聚焦在石英上,分别采用激光热加工法和激光诱导等离子体法加工微通道。热加工的通道长度可控,通道周围产生热裂纹;诱导等离子体加工的微通道内壁光滑,通道深度可达4mm。研究了激光热加工微通道时的温度场和热应力分布,分析了激光诱导等离子体加工微通道的过程。研究表明,激光热加工时温度场的存在导致热应力的产生,热应力超过石英断裂阈值使石英发生炸裂,导致微通道的形成及热裂纹的产生;激光诱导等离子体法由于等离子体屏蔽效应产生的高温等离子体烧蚀石英形成微通道,避免了热裂纹的产生。
The 1064 nm nanosecond pulsed laser output from a Q-switched Nd: YAG laser was focused on quartz and the microchannels were fabricated by laser thermal processing and laser-induced plasma respectively. Thermal processing of the channel length controllable, hot cracks around the channel; induction plasma processing micro-channel wall smooth, channel depth up to 4mm. The temperature field and thermal stress distribution of the microchannels during laser thermal processing were studied. The process of laser induced plasma processing of microchannels was analyzed. The results show that the existence of thermal field leads to the generation of thermal stress, and the thermal stress exceeds the threshold of quartz fracture to cause the quartz to burst, resulting in the formation of microchannels and the generation of thermal cracks. The laser-induced plasma method results from the plasma shielding effect The high temperature plasma ablates the formation of microchannels by quartz to avoid the occurrence of hot cracks.