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主要介绍了一种全新的设计方法,在标准的EDA设计环境里、采用可重复使用的MEMS设计库单元,使设计者能够对MEMS产品的工艺可行性作分析.这种设计方法是MEMS开发单位采用“面向加工的设计方法”的重要基础.“,”The focus of this article is to introduce a new design methodology that enables virtual manufacturing (VM) for MEMS products based on re-usable libraries (of MEMS components) in a standard EDA design tool. Such a methodology forms a major foundation for any organization interested in adopting a Design for Manufacturability (DFM) for MEMS.