,Enhanced Light Output of InGaN-Based Light Emitting Diodes with Roughed p-Type GaN Surface by Using

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Roughened surfaces of light-emitting diodes (LEDs) provide substantial improvement in light extraction efficiency.By preparing the self-assemble nanoporous Ni template through rapid annealing of a thin Ni film,followed by a low damage dry etching process,a p-side-up LED with a roughened surface has been fabricated.Compared to a conventional LED with plane surface,the light output of LEDs with nanoporous p-GaN surface increases up to 71% and 36% at applied currents of 1 mA and 20mA,respectively.Meanwhile,the electrical characteristics are not degraded obviously after surface roughening.
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