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用热丝CVD法,以丙酮为碳源,在WC-Co硬质合金衬底上沉积金刚石薄膜,研究了碳源浓度对金刚石薄膜涂层刀具性能的影响,结果表明,碳源浓度对金刚石涂层薄膜质量、形貌和粗糙度、薄膜与衬底间的附着力、刀具的耐用度及切削性能有显著影响,合理控制碳源浓度对获取实用化的在硬质合金刀具基体上沉积高附着强度。低粗糙度金刚石薄膜的新技术具有重要的意义。
Diamond film was deposited on WC-Co cemented carbide substrate by hot filament CVD method using acetone as carbon source. The effect of carbon source concentration on the tool performance of diamond thin film coating was studied. The results show that the carbon source concentration on the diamond coating Layer film quality, morphology and roughness, adhesion between the film and the substrate, tool durability and cutting performance have a significant impact on the reasonable control of the carbon source concentration to obtain practical deposition on carbide substrate high adhesion strength. The new technology of low roughness diamond film is of great significance.