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为提高7A04铝合金的表面性能,利用射频辅助等离子体浸没离子注入与沉积设备,在其表面制备类金刚石(DLC)薄膜。由于DLC薄膜与铝合金基体力学性能差别较大,导致膜基结合力差。本研究采用非平衡磁控溅射技术预先沉积一层Si膜,作为过渡层改善膜基结合力;利用激光拉曼光谱仪、维式显微硬度计、纳米划痕仪、摩擦磨损试验机等设备,系统分析了薄膜结构、显微硬度、膜基结合力及耐磨损性能。结果表明,Si过渡层的制备提高了基体的承载能力和膜基结合力,进而使耐磨损性能得到大幅度提高。
In order to improve the surface properties of 7A04 aluminum alloy, radio-assisted plasma immersion ion implantation and deposition equipment was used to prepare diamond-like carbon (DLC) films on its surface. Due to the large difference between the mechanical properties of DLC film and aluminum alloy matrix, resulting in poor film-based bonding. In this study, a layer of Si film was pre-deposited by unbalanced magnetron sputtering as a transition layer to improve the adhesion of the film substrate. The laser Raman spectroscopy, the micro-hardness tester, the nano-scratch tester and the friction and wear tester The film structure, microhardness, film-based bond strength and wear resistance were systematically analyzed. The results show that the preparation of Si transition layer can improve the bearing capacity and the bonding strength of the matrix, and then improve the wear resistance greatly.