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本文讨论了金属氧化物表面的气—固,气—气反应及其相关的电子过程。这是金属氧化物半导体电阻型气敏传感器作用机理的基础。在此基础上,定性和半定量地解释了许多实验事实。
This article discusses the gas-solid, gas-gas reactions and their associated electronic processes on metal oxide surfaces. This is the basis of the mechanism of action of the metal oxide semiconductor resistive gas sensor. On this basis, many experimental facts are explained qualitatively and semi-quantitatively.