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为满足脉冲激光沉积镀膜技术对激光光源的要求,研制了低重频、高能量全固态紫外激光器。采用凹凸非稳谐振腔结构,使用高速电光Q开关进行调制,通过氙灯泵浦Nd:YAG激光晶体产生1064 nm脉冲种子光,经腔外两级单通放大,得到能量大于1J的1064 nm基频光。采用LBO晶体进行倍频与和频,在重频10Hz时得到紫外光最高能量170 m J,峰值功率22 MW,脉宽7.7 ns。
In order to meet the requirements of laser light source for pulsed laser deposition coating technology, a low-frequency, high-energy all-solid-state UV laser was developed. The structure of bumpy unstable resonator is modulated by high speed electro-optic Q-switch. The 1064 nm pulse seed light is generated by xenon lamp pumped Nd: YAG laser crystal and amplified by single-pass extracavity to obtain 1064 nm fundamental frequency Light. Using LBO crystal frequency doubling and sum frequency, the maximum energy of 170 m J UV, the peak power of 22 MW, pulse width of 7.7 ns at the frequency of 10Hz.