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提出一种应用机器视觉技术的激光干涉法,可以研究压电材料的逆压电系数.在传统干涉测量法中引入机器视觉实现干涉图像灰度最佳估计,使用数字图像处理技术,一方面应用降噪算法有效去除激光干涉图样中的噪声,从而确定激光干涉场的光强分布,另一方面将干涉图样的明暗变化进一步转化为可量度的灰度变化以提高测量分辨力.通过合理设计算法,该方法中对位移的理论测量分辨力可以提高达一个数量级,为干涉光波长的1/1024,因此在逆压电系数d31的实验测量中可以有效提高分辨力.
A laser interferometry method based on machine vision technology is proposed to study the inverse piezoelectric coefficient of piezoelectric materials.It is introduced into the traditional interferometry to realize the best estimation of the grayscale of the interference image by using the digital image processing technology. The noise reduction algorithm can effectively remove the noise in the laser interference pattern to determine the light intensity distribution of the laser interference field and on the other hand further transform the lightness and darkness of the interference pattern into a measurable gray change to improve the measurement resolution.By the reasonable design of the algorithm In this method, the resolution of the theoretical measurement of displacement can be increased by an order of magnitude, which is 1/1024 of the wavelength of the interference light. Therefore, the resolving power can be effectively improved in the experimental measurement of the inverse piezoelectric coefficient d31.