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基于光纤干涉投影傅里叶变换轮廓术,提出了减小其测量物体形貌中误差的方法。在理论上分析了光纤干涉在接收屏上的光强分布,并通过分析得到其强度满足一定的高斯分布。在条纹预处理过程中对其进行光强校正,校正后的条纹频谱基频成分更加清晰。分析了条纹非正弦性引起的相位误差,在测量结果上对其进行补偿。通过仿真实验得出,经过所提出方法处理后的面形恢复精度比未处理前有了很大程度的提高。实物实验对给定标准件进行测量,验证了这种方法的正确性。
Based on the optical fiber interferometric projection Fourier transform profilometry, a method to reduce the error of the shape of the object is proposed. In theory, the optical intensity distribution of the optical fiber interference on the receiving screen is analyzed, and the Gaussian distribution whose intensity satisfies a certain degree is obtained. During stripe preprocessing, the light intensity is corrected, and the corrected fundamental frequency component of streak spectrum is clearer. The phase error caused by non-sinusoidal fringes is analyzed and compensated for the measurement results. The simulation results show that after the proposed method, the surface shape recovery accuracy has been greatly improved than that before untreated. The physical experiment measured the given standard parts, which verified the correctness of this method.