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采用同步辐射单色光形貌术观察了 6H SiC单晶中的微管缺陷 ,发现晶片中Burgers矢量为 1c的螺位错具有较高的密度。此外 ,还观察到对应较大Burgers矢量的微管。基于微管附近的应变场 ,并根据衍射几何 ,模拟计算了一系列具有不同Burgers矢量的微管在形貌像中的直径 ,计算结果与实验观察符合较好
The microtube defects in 6H SiC single crystal were observed by monochromatic synchrotron radiation. It was found that the threading dislocation of Burgers vector 1c in the wafer had a higher density. In addition, microtubules corresponding to larger Burgers vectors were also observed. Based on the strain field near the microtubule and according to the diffraction geometry, the diameters of a series of microtubes with different Burgers vectors in the topography are simulated and the calculated results are in good agreement with the experimental observations