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实验中设计了一种基于微型非共振腔的石英增强光声光谱痕量气体传感器,用来检测非纯氦气中的痕量氨气浓度.该传感器采用的微型非共振腔只在空间上限制声波扩散以达到增强信号目的,而不是像传统微型共振腔一样依靠共振效应.如此的设计使探测小分子无机气体的光谱测声器尺寸远远小于共振腔的配置而有利于准直.不同气压下的信号和噪声也被研究,用来优化传感器性能.在这种配置下和27.7kPa的最优气压下,获得的最佳氨气探测灵敏度为463ppb(1σ,1s积分时间),相应的归一化噪声等效吸收系数为4.3×10~(-9)cm~(-1)W/(Hz)1/2.
In the experiment, a miniature non-resonant cavity based quartz enhanced photoacoustic spectrometer trace gas sensor was designed to detect the concentration of trace ammonia in non-pure helium.The micro-non-resonant cavity used by the sensor was only limited in space Sonic diffusion in order to achieve the purpose of enhancing the signal, rather than relying on the same resonance effect as the traditional miniature resonant cavity so designed to detect small molecular inorganic gas spectrometer size is much smaller than the configuration of the resonant cavity is conducive to collimation. The signal and noise underneath were also investigated to optimize sensor performance. The optimal ammonia detection sensitivity obtained at this configuration with an optimum pressure of 27.7 kPa was 463 ppb (1σ, 1s integration time), correspondingly The equivalent absorption coefficient of one noise is 4.3 × 10 -9 cm -1 W / (Hz) 1/2.