高效硅片切割液TF-033的研究

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通过分子构效关系的研究及合理的配方设计,以低泡嵌段聚醚和梳型结构分散剂为主要原料,添加润湿剂、抗氧化剂、防腐剂、消泡剂等表面活性剂,研制了一种硅片切割液TF-033。它具有低粘度、高分散性、高润滑性等特点。一方面能有效解决因砂浆沉积引起的脏污片问题,提高切片稳定性和成品率,另一方面大幅降低了设备能耗,进而达到降本增效的目的。
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