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利用MEMS技术制作了不同尺寸的镍(Ni)膜微桥结构样品。采用纳米压痕仪XP系统测量了微桥载荷与位移的关系,并结合微桥力学理论模型得到了两种不同尺寸的Ni膜的弹性模量和残余应力。结果表明,两种不同尺寸的Ni膜的弹性模量结果一致,为190 GPa左右,但是残余应力变化较大。与采用纳米压痕仪直接测得的带有硅(Si)基底的Ni膜弹性模量186.8 7.5 GPa相比较,两者符合较好。
Micro-bridge structures of nickel (Ni) film with different sizes were fabricated by MEMS technology. The relationship between the load and the displacement of the micro-bridge was measured by the nano indenter XP system. The elastic modulus and residual stress of the Ni films with different sizes were obtained by combining with the theoretical model of micro-bridge mechanics. The results show that the elastic modulus of two Ni films with different sizes is consistent with about 190 GPa, but the residual stress changes greatly. The results are in good agreement with the elastic modulus of Ni film with Si substrate of 186.8 7.5 GPa measured directly by nano indenter.