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本文评述了金属有机化合物化学汽相淀积(MO-CVD)法的原理、特点及应用。着重讨论了Ⅱ-Ⅵ族材料的MO-CVD法的制备。
This paper reviews the principles, characteristics and applications of the MO-CVD method. The preparation of Ⅱ-Ⅵ materials by MO-CVD method is emphatically discussed.