论文部分内容阅读
在连续化真空溅镀生产实践中,由于夏秋两个季节的环境湿度大,加之待镀工件和夹具携带的水蒸气,使得真空腔体达到要求的高真空时间较长。这样既延缓了生产节拍,降低了设备产能,又加大了能源消耗。在不改变原生产线设备布局的情况下,利用超低温冷冻技术对原生产线进行改造,以实现快速捕集真空腔体内的水气,使真空腔体迅速达到要求的高真空,并取得了良好效果。
In the continuous vacuum sputtering production practice, due to the summer and fall of the two seasons, the ambient humidity, coupled with the workpiece to be plated and fixture carry water vapor, making the vacuum chamber to achieve the required high vacuum for a long time. This will not only delay the production beats, reduce equipment capacity, but also increased energy consumption. Without changing the layout of the original production line equipment, the use of ultra-low temperature freezing technology to transform the original production line in order to achieve rapid capture of water vapor in the vacuum chamber, the vacuum chamber quickly reached the required high vacuum, and achieved good results.