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介绍了用于磨床加工的光外差表面粗糙度在线干涉测量仪整机的信号处理系统，着重讨论了其中的两项关键技术，即利用负反馈构成的宽动态范围测量信号的自动电压控制以及依据计大数和测小数相结合的高精度动态相位测量，系统的测量精度达２．６°（相当于３．２ｎｍ），允许测量中最大多普勒频移±１０ｋＨｚ（对应高度的变化率±８．７５×１０－３ｍ／ｓ），完全满足磨床加工中表面粗糙度在线测量的要求。现场测试证实了这一点，这对于精加工、超精加工表面粗糙度的在线质量控制、提高加工精度等非常重要。
This paper introduces the signal processing system of the optical heterodyne surface roughness on-line interferometer for grinder machining. Two key technologies are discussed, that is, the automatic voltage control of wide dynamic range measurement signal using negative feedback and Based on a high-precision dynamic phase measurement combining a large number of counts and a measured decimal fraction, the system achieves a measurement accuracy of 2.6 ° (equivalent to 3.2 nm) allowing maximum Doppler shift of ± 10 kHz in the measurement (corresponding to a high rate of change ± 8.75 × 10-3m / s), fully meet the requirements of on-line surface roughness measurement in grinding machine. Field testing confirms this, which is important for on-line quality control of finishing, super-finishing surface roughness, and improved machining accuracy.