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为改善H13钢的耐磨性能,本文采用工业型多弧离子镀设备在H13钢表面沉积耐磨硬质薄膜。借助扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、透射电子显微镜、维氏硬度计、摩擦磨损仪测试与分析TiAlN和TiCrAlSiCN薄膜的微观结构、硬度和摩擦学性能。低Al含量的TiAlN薄膜含面心立方结构的TiAlN固溶体和金属Ti相,TiAlN的200晶面呈择优取向;高Al含量的TiAlN薄膜为面心立方结构的TiAlN固溶体,111晶面呈择优取向。低Al含量的TiAlN薄膜硬度低(1871HV_(10 g))、高摩擦系数(0.8)和高磨损率(9.53×10~(-6)mm~3/N·m),高铝含量的TiAlN薄膜具有高硬度(3521 HV_(10 g))、摩擦系数明显下降(0.59)。TiAlN薄膜中加入Cr、Si和C元素形成的TiCrAlSiCN薄膜,其结构为纳米晶和非晶的复合结构,摩擦系数和磨损率降低是由于非晶相起减摩作用、纳米晶氮化物起耐磨作用;尤其低Si高C含量TiCrAlSiCN薄膜具有低摩擦系数(0.48)和磨损率(7.28×10~(-6)mm~3/(N·m)),高硬度(3613 HV_(10 g))。
In order to improve the wear resistance of H13 steel, this paper adopts industrial multi-arc ion plating equipment to deposit wear-resistant hard film on the surface of H13 steel. The microstructure, hardness and tribological properties of TiAlN and TiCrAlSiCN films were tested and analyzed by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, Vickers hardness tester and friction abrasion tester. The TiAlN thin films with a low Al content contain a TiAlN solid solution with a face-centered cubic structure and a Ti metal with a preferred orientation of 200. The TiAlN thin film with a high Al content is a TiAlN solid solution with a face-centered cubic structure. Low Al content TiAlN films have low hardness (1871HV 10 g), high friction coefficient (0.8) and high wear rate (9.53 × 10 -6 mm 3 / N · m), high content of TiAlN films With high hardness (3521 HV_ (10 g)), the friction coefficient decreased significantly (0.59). TiAlN thin films with Cr, Si and C elements formed TiCrAlSiCN film, the structure of nanocrystalline and amorphous composite structure, the friction coefficient and wear rate reduction is due to the role of anti-friction amorphous, nanocrystalline nitride wear-resistant Especially low Si and high C content TiCrAlSiCN films have low friction coefficient (0.48) and wear rate (7.28 × 10 -6 mm 3 / (N · m)), high hardness (3613 HV 10 g) .