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用ＫｒＦ准分子激光，在稀释的Ｃｌ２气体中对镀有铜膜的印刷板进行微细加工，得到的最小腐蚀宽度为１６μｍ。
The KrC excimer laser was used to microfabricate a copper-plated printed board in dilute Cl2 gas to give a minimum etch width of 16 [mu] m.