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建立了带高度控制阀的空气弹簧力学模型及超精密机床三自由度隔振模型,在原被动隔振的基础上采用对称输出反馈对其进行振动主动控制。MATLAB仿真结果表明:采用对称输出反馈可有效的降低系统振动水平,振动位移幅值可减小70%。
The mechanical model of air spring with height control valve and the three degrees of freedom vibration isolation model of ultra-precision machine tool are established. Based on the original passive vibration isolation, symmetrical output feedback is used to control the vibration actively. The simulation results of MATLAB show that the symmetrical output feedback can effectively reduce the vibration level of the system, and the amplitude of vibration displacement can be reduced by 70%.