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本文提出了三种用于盘片精密切削及测试的系统:高精度车床真空吸盘系统;盘片平面度精密测试系统和能测一般切削力及微小切削力的测试系统。它们既适用于盘片精密切削及测量试验,也可用于其它场合。
In this paper, three kinds of system for precision cutting and testing of disc are put forward: high precision lathe vacuum chuck system; disc flatness precision test system and test system which can measure general cutting force and small cutting force. They are suitable for precision disc cutting and measurement tests, but also for other occasions.