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表面特征参数的在位检测对生产过程控制可提供十分有用的信息,从而可在制造过程中直接调节加工参数.检测要求取决于应用领域.对于超精密表面,例如微结构的或连续结构的光学器件,宜应用干涉法进行形状检测,因为干涉法有极高的精度和适应性,此外,表面可被迅速检测,因而减少生产时间.但是干涉法对机器振动、噪 声或空气扰动等外界影响十分敏感,因而很难在生产环境中完成干涉测量.提出了在机械加工环境中的干涉测量和基于对在位干涉检测中各种基本干涉影响分析结果基础上的仿真.
In-position inspection of surface feature parameters provides very useful information on manufacturing process control so that process parameters can be adjusted directly during the manufacturing process. The inspection requirements depend on the application. For ultra-precision surfaces such as microstructured or continuous structured optics Devices, interferometry should be used for shape detection because of the high accuracy and adaptability of the interferometry and, in addition, the surface can be quickly detected, thus reducing production time, but interferometry has a very significant impact on the outside world such as machine vibration, noise or air disturbances It is very difficult to complete the interferometry in the production environment.It presents the simulation of the interference measurement in the machining environment and the results based on the analysis of the basic interference in the in-position interference detection.