论文部分内容阅读
利用半导体激光器线性调频外差干涉原理及分频复用技术构成的新型光纤位移传感器,可同时进行多点位移测量。测量范围为±1mm,精度为±0.15μm(3σ)。研究了光强因素对其测量精度的影响。
The new type of optical fiber displacement sensor, which is composed of the principle of the chirped-frequency heterodyne interference of the semiconductor laser and the frequency-division multiplexing technology, can carry out multi-point displacement measurement at the same time. Measurement range of ± 1mm, accuracy of ± 0.15μm (3σ). The influence of light intensity on the measurement accuracy was studied.