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用真空双蒸发源交替蒸发法和单蒸发源混合瞬时蒸发法制备了Ag-MgF2金属陶瓷薄膜。透射电镜、电子衍射、X射线衍射以及X射线光电子能谱分析结果表明，薄膜由晶态超微粒Ag镶嵌于主要为非晶态的MgF2中构成。Ag-MgF2形成的金属陶瓷复合晶体结构所对应的主要谱峰为d=0．26102，0．23540，0．20393nm。用真空单蒸发源混合瞬时蒸发法制备的Ag-MgF2薄膜表面元素的结合能大于双蒸发源交替蒸发法制备的薄膜表面元素的结合能。
Ag-MgF2 cermet thin films were prepared by a combination of vacuum evaporation and single evaporation evaporation. The results of TEM, EDS, X-ray diffraction and X-ray photoelectron spectroscopy show that the thin film is composed of Ag superlattice embedded in MgF2, which is mainly amorphous. The major peaks corresponding to the cermet composite crystal structure formed by Ag-MgF2 are d = 0.26102, 0.23540 and 0.20393 nm. The binding energy of the surface elements of Ag-MgF2 thin film prepared by the vacuum single-evaporation instantaneous evaporation method is larger than the binding energy of the thin film surface elements prepared by the double evaporation source alternating evaporation method.