论文部分内容阅读
应用超显微硬度计测定１Ｃｒ１８Ｎｉ９Ｔｉ奥氏体不锈钢氮离子注入层的硬度，并用Ａｕｇｅｒ电子能谱仪（ＡＥＳ）及高精度轮廓仪测定氮离子注入层氮浓度分布及深度．结果表明：在９０ｋｅＶ，３ｘ１０~１７Ｎ＋／ｃｍ~２注入时．共注入层深度为０．１８μｍ、用１ｍＮ载荷侧得本征硬度ＨＶ为３．４７ＧＰａ，比非注入态表面硬度提高三倍之多，合理的试验载荷应≤ｌｍＮ（０．１ｇ）．
The hardness of the nitrogen ion implanted layer of 1Cr18Ni9Ti austenitic stainless steel was measured by using an ultra-microhardness tester. The nitrogen concentration distribution and depth of nitrogen implanted layer were measured by Auger electron spectrometer (AES) and high-precision profiler. The results show that: at 90keV, 3x10 ~ 17N + / cm ~ 2 injection time. The total implantation depth is 0.18μm, and the intrinsic hardness HV is 3.47GPa on the 1mN load side, which is three times higher than the non-implanted state. The reasonable test load should be ≤1mN (0.1g).