该装置如图1,由测试系统及抽气系统1、2和充气系统四部分组成。测试系统主要由测试室(22)、四极质谱管(17)、B—A规(16)、试样室(18)可烘烤阀(13)和蝶阀(14)等组成。样品放气和气体分析在此系统内进行。抽气系统1是由已知流导小孔(11)、扩散泵(3)、机械泵(1)、低真空阀(7) The device shown in Figure 1, by the test system and exhaust system 1,2 and inflatable system composed of four parts. The test system consists of the test chamber (22), the quadrupole mass spectrometer (17), the B-A gauge (16), the sample chamber (18), the bake valve (13) and the butterfly valve (14). Sample bleed and gas analysis are performed in this system. The air extraction system 1 is composed of a known guide orifice (11), a diffusion pump (3), a mechanical pump (1), a low vacuum valve (7)