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为进一步提高激光测长机的测量精度及可靠性,满足高精度长度尺寸的计量检定要求,研制了一种可调整光程的激光测长机。采用激光干涉仪作为测量基准,结构设计符合阿贝原则,同时,可根据被测长度的大小调整激光干涉仪和测量组件的安装位置,提高了测量准确度。并对影响激光测长机测量准确度的误差进行了不确定度分析。实验结果表明,该激光测长机的测量准确度达到了±(0.5μm+1.5×10-6L),测量重复性为0.2μm。满足高测量精度及高可靠性等技术指标要求。
In order to further improve the measurement accuracy and reliability of the laser length measuring machine and meet the requirements of metrological verification of the high-precision length and size, a laser length measuring machine with adjustable optical path was developed. The laser interferometer is used as the measurement standard, the structure design conforms to Abbe’s principle, meanwhile, the installation position of the laser interferometer and the measuring component can be adjusted according to the measured length, thereby improving the measurement accuracy. And the uncertainty affecting the accuracy of laser length measuring machine is analyzed. The experimental results show that the measurement accuracy of the laser length measuring machine reaches ± (0.5μm + 1.5 × 10-6L) and the repeatability is 0.2μm. Meet the technical requirements of high measurement accuracy and high reliability.