通过对硅进行微机械加工、室温操作和批量处理,波音公司Anaheim电光中心在红外成像技术上取得了突破,获得了U3000型非致冷焦平面列阵。新的器件由于省略了低温致冷和机械扫描,因而提供了低成本的成像。作为附带优点,还降低了复杂性、功率、重量和成本。 By micromachining silicon, room temperature operation and batch processing, Boeing Anaheim electro-optic center made a breakthrough in infrared imaging technology, obtained U3000 uncooled focal plane array. The new device offers low cost imaging due to the omission of cryogenic refrigeration and mechanical scanning. As a side benefit, complexity, power, weight, and cost are also reduced.