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《电子工业专用设备》(原名《半导体设备》)自1971年创刊至今,已整整走过了廿年的历程。值此创刊廿周年喜庆之际,我们特向多年来关心本刊并在多方面给予本刊大力支持的各级领导,向热心为本刊撰译稿件的广大作者,向踊跃订阅本刊的广大读者,向一切为本刊的进步与发展作出贡献的人们,表示衷心感谢,并致以崇高敬意。 1971年,正当我国半导体技术有了一定的基础,集成电路在国内艰难起步,急需工艺装备为之支撑配套的关键时刻,由几名技术人员创办的技术刊物《半导体设备》在地处三线的甘肃平凉问世了。刊物创办初期,尽管由于编办者缺乏经验,在编辑和印刷方面还比较粗
The “Electronics for Industrial Equipment” (formerly known as “Semiconductor Equipment”) has been a full twenty years since its founding in 1971. On the occasion of the 20th anniversary of the start of this festive occasion, we pay special attention to many years to give full support to our publications and at all levels of leadership, enthusiastic for the publication of the author of the majority of authors, to enthusiastically subscribe to our publication The reader expresses his heartfelt thanks to all those who contributed to the progress and development of this publication and lays high tribute. In 1971, just as China’s semiconductor technology has a certain foundation, integrated circuits are difficult to start in the country, the urgent need for technology and equipment supporting the key moment, by a number of technical staff founded the technical publication “semiconductor equipment” is located in Gansu Pingliang came out. In the early days of publication, despite the lack of experience of the organizers, it was still relatively crude in editing and printing