高能密度和微型化已经成为动力设备发展的必然趋势,然而,润滑技术的发展直接制约着高速透平的极限转速。微机电系统(MEMS)中的高速透平内轴承与转子间最小间隙为微米量级甚至更小,必然会给装置的设计和制造带来一些新问题。文中简要介绍了基于气体润滑技术的MEMS透平国内外发展状况,并对相关领域的研究进展进行了展望。 High-energy density and miniaturization have become the inevitable trend of power equipment development. However, the development of lubrication technology directly restricts the speed limit of high-speed turbine. Micro-Electro-Mechanical Systems (MEMS) in the high-speed turbine bearings and the smallest gap between the rotor on the order of microns or even smaller, will inevitably give the device design and manufacturing to bring some new problems. This paper briefly introduces the development status of MEMS turbine based on gas lubrication technology at home and abroad, and prospects the research progress in related fields.