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本文重点介绍半导体应变片的特点、温度自补偿半导体应变片补偿理论、基本工艺、性能指标、温度补偿特性及其应用等。同时还介绍了在我们研制中采用的半导体应变片灵敏度测试的典型方法。
This article focuses on the characteristics of semiconductor strain gauges, temperature compensation semiconductor strain gauge compensation theory, basic technology, performance indicators, temperature compensation characteristics and their applications. A typical method for testing the sensitivity of semiconductor strain gauges used in our development is also presented.