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提出了一种制作 12 8× 12 8球冠型GaAs凹折射微透镜阵列新的方法———曲率倒易法。扫描电子显微镜(SEM )显示微透镜阵列为表面轮廓清晰的凹球冠面阵列 ,表面探针测试结果显示阵列表面光滑、单元重复性好 ,其凹深为 1 2 6 8μm ,焦距为 - 35 2 0 4μm。
A new method of making curvature array of 12 8 × 12 8 spherical GaAs concave catadioptric microlens arrays is proposed. Scanning electron microscopy (SEM) shows that the microlens array is a concave spherical crowns array with clear surface profile. The surface probe test results show that the surface of the array is smooth and the unit repeatability is good. The concave depth is 1268μm and the focal length is -352 0 4 μm.