由上海光学仪器确究所设计、研制的BPJ型电视硅片图形缺陷检查仪,于1987年7月通过部级鉴定。该仪器主要用于半导体流水线中检查硅片每道光刻的图形质量。仪器由硅片台和检查显微镜两大部分组成。输片装置上片盒中的硅片逐片自动地送到预定位台,经机械手传送到承片台上,然后进行五点法自动检查(亦可用手动逐点检查),同 By the Shanghai Optical Instrument Institute of the design, development of BPJ-type TV graphics defects wafer tester, in July 1987 through ministerial identification. The instrument is mainly used for checking the quality of each lithography of a silicon wafer in a semiconductor assembly line. Instrument from the wafer stage and inspection microscope composed of two parts. Sliding device on the cassette chip in the wafer by piece automatically sent to the pre-positioning platform, the robot sent to the stage, and then carry out five-point method automatically check (also available manually check point by point), with