离子束表面改性技术是70年代初逐渐发展起来的一种新颖的表面改性技术。该技术是把工件放在离子注入机的真空室中,在几十至几百千伏的电压下,把所需元素的离子注入到工件表层内的一种表面强化处理工艺。大量实践已证实,离子注入能使工件的摩擦系数、耐磨 Ion beam surface modification technology is a kind of novel surface modification technology developed gradually in early 1970s. The technology is a surface strengthening process that places a workpiece in a vacuum chamber of an ion implanter and injects ions of a desired element into the surface of the workpiece at tens to hundreds of kilovolts of voltage. A large number of practices have confirmed that the ion implantation can make the friction coefficient of the workpiece, wear-resistant