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介绍一种适用于半导体烧结炉的控温系统。该系统由单回程调节器、可编程控制器与功率控制模块组成。简单介绍了控制算法,给出实时控制结果。实验证明,控温曲线达到了预期效果,并且超调量极小。
A temperature control system suitable for semiconductor sintering furnace is introduced. The system consists of a single return regulator, programmable controller and power control module. A brief introduction to the control algorithm gives real-time control results. Experiments show that the temperature control curve to achieve the desired results, and ultra-minimum overshoot.