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分析了改进后的共面插指电极在高场强下的电场分布,验证了插指电极结构用于制作电光聚合物薄膜器件的可行性。基于插指电极薄膜器件在极化过程中电场分布的不均匀性,建立了关于电极间距、聚合物厚度、电场分布的三维模型,得到了不同极化电压下的平均场强。为了测试插指电极薄膜器件的电光系数,对三明治结构器件的椭偏透射测量电光系数方法做了改进。在相同电场下,对比了共面插指电极薄膜器件与三明治结构薄膜器件的电光系数,结果表明薄膜器件结构的变化不会引起薄膜本身电光系数的改变。
The electric field distribution of the improved coplanar interdigital electrodes at high field strength is analyzed. The feasibility of the interdigital electrode structure for fabrication of electro-optic polymer thin film devices is verified. Based on the inhomogeneity of the electric field distribution during the polarization process, the three-dimensional model of electrode spacing, polymer thickness and electric field distribution was established and the average field strength under different polarization voltages was obtained. In order to test the electro-optic coefficient of the finger-electrode thin film device, the method of measuring the electro-optic coefficient by ellipsometric transmission of the sandwich structure device is improved. Under the same electric field, the electro-optic coefficients of coplanar interdigital electrode devices and sandwich devices are compared. The results show that the change of the device structure will not change the electro-optic coefficients of the films.