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一、引言为了重复地、可控地制备高质量的GaAs外延材料,建立一个高气密性,抗强腐蚀性的外延生长反应系统,采用Ga-AsCl_3—H_2系统是首要的,而且是必不可少的。由于AsCl_3具有极强的腐蚀性,能够提供制作反应系统的材料是很少的,只有石英、聚四氟乙烯等材料。虽然氟橡胶具有耐腐蚀,优良的机械弹性等优点,为许多工作者所采用,但是大量事实说明氟橡胶仍经不住AsCl_3的强烈腐蚀,并且是外延材料质量低劣的重要原因之一。因此,设计并建立一个高气密性,抗强腐蚀性的外延生长反应系统
I. INTRODUCTION In order to reproducibly and controllably fabricate high quality GaAs epitaxial materials and establish a highly airtight and highly corrosive epitaxial growth reaction system, the Ga-AsCl 3 -H 2 system is the most important and must not be used Less. Since AsCl_3 is highly corrosive, it is rare to be able to provide materials for making reaction systems, only quartz, PTFE and other materials. Although fluoroelastomers have the advantages of corrosion resistance and excellent mechanical elasticity, which are used by many workers, a large number of facts show that fluoroelastomers still can not withstand the strong corrosion of AsCl_3 and is one of the important reasons for the poor quality of epitaxial materials. Therefore, the design and establishment of airtight, anti-corrosive epitaxial growth reaction system