采用溶胶-凝胶法在玻璃基片上旋涂生长了ZnO、Fe,Ni单掺杂及(Fe,Ni)共掺杂ZnO薄膜。产物的显微照片及XRD图谱结果表明,该方法所制备的ZnO薄膜表面均匀致密,都存在(002)择优取向,具有六角纤锌矿结构,晶粒尺寸平均在13nm左右,振动样品磁强计(VSM)测试结果显示掺杂ZnO薄膜均存在室温铁磁性。光致发光(PL)测量表明所有样品薄膜的PL谱主要由较强的紫外发光峰(394nm)、蓝光峰(420nm)、绿光峰(480nm)组成。Fe、Ni单掺杂和共掺杂并不改变ZnO薄膜的发光峰位置,但掺杂后该紫外发光峰减弱,420nm处的蓝光峰增强。 The single-doped ZnO, Fe, Ni and (Fe, Ni) codoped ZnO thin films were spin-coated on the glass substrate by sol-gel method. The results of the photomicrographs and XRD patterns of ZnO thin films show that the ZnO thin films prepared by this method have a uniform and compact surface with (002) preferred orientation, a hexagonal wurtzite structure with an average grain size of about 13 nm, and a vibrating sample magnetometer (VSM) test results show that doped ZnO films have room temperature ferromagnetism. The photoluminescence (PL) measurements showed that the PL spectrum of all the samples consisted of strong UV peak (394nm), blue peak (420nm) and green peak (480nm). Single doping and co-doping of Fe and Ni did not change the luminescence peak position of ZnO thin films, but the doping of the UV luminescence peak was weakened and the blue light peak at 420 nm was enhanced.