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随着机械、电子、光学、材料和半导体等工业不断微型化、精密化的需求,开发的微纳米结构的三维形貌、表面膜厚、内部结构以及物理性质等特性对微纳米结构的研发和生产质量控制至关重要。因此,针对微纳米制造领域的三维非接触式测量系统及其技术的研究具有重要的学术价值和现实意义。本文提出并搭建了一种基于Linnik型偏振白光干涉架构的三维非接触式测量试验系统,并对其关键技术进行了研究,主要包括显微镜光学自动对焦技术、Linnik型白光干涉条纹自动搜索技术、微观表面三维形貌重构及系统标定技术、透明膜
With the continuous miniaturization and precision requirements of the industries such as machinery, electronics, optics, materials and semiconductors, the development of micro-nano structures and the development of micro-nano structures and their properties such as the three-dimensional topography, the surface film thickness, the internal structure and the physical properties of the micro- Production quality control is crucial. Therefore, the study of three-dimensional non-contact measurement system and its technology in the field of micro and nano manufacturing has important academic value and practical significance. In this paper, a three-dimensional non-contact measurement experiment system based on Linnik-type polarized white light interference architecture is proposed and put forward. The key technologies are studied, including microscope optical auto-focus technology, Linnik-type white light interference fringe automatic search technology, microscopic Surface three-dimensional morphology reconstruction and system calibration technology, transparent membrane