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本论文采用阳极氧化的方法,在NH4HF2+NH4H2PO4的混合水溶液中于室温下以金属钛为基体原位合成氧化钛纳米管阵列薄膜。讨论了电解液成分、外加电压、溶液的pH值对氧化钛纳米管阵列薄膜微观结构及形貌的影响,并建立了阳极氧化钛纳米管阵列薄膜的生长模型。氧化钛纳米管的结构与外加电压有很大的关系,只有电压在5～35V范围内才能制备出二氧化钛纳米管阵列薄膜,其管径随着电压的升高而增加,且管径范围为30～160nm。而薄膜的厚度与电解液有关,通过控制电解液的成分及pH值,可获得厚度为6.5μm的氧化钛纳米管阵列薄膜。
In this thesis, anodic oxidation was used to synthesize titanium oxide nanotube film in-situ in a mixed aqueous solution of NH4HF2 + NH4H2PO4 at room temperature with metallic titanium as substrate. The effects of electrolyte composition, applied voltage and solution pH on the microstructure and morphology of TiO2 nanotube array films were discussed. The growth model of the anodized titanium nanotube array films was also established. The structure of titania nanotube has a great relationship with the applied voltage. Only in the range of 5 ~ 35V, the titania nanotube array film can be prepared. The diameter of the titania nanotube increases with the increase of the voltage, and the diameter of the titania nanotube is 30 ~ 160nm. The thickness of the film is related to the electrolyte. By controlling the composition and pH of the electrolyte, a titanium oxide nanotube array film with a thickness of 6.5 μm can be obtained.