Over the past half century,the semiconductor chips have deeply influenced our everyday life through increasingly sophisticated electronic products.The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law,nowadays referring to a doubling of transistor counts per chip every 18 months.Sustaining Moore’s Law is economically beneficial;while the manufacturing cost per chip has been held constant,integrating smaller and denser transistors reduces the cost per function Over the past half century, the semiconductor chips have deeply influenced our everyday life through more sophisticated electronic products. The central driving force underlying the remarkable evolution in semiconductor industry is Moore’s Law, nowadays referring to a doubling of transistor counts per chip every 18 months. Sustaining Moore’s Law is economically beneficial; while the manufacturing cost per chip has been held constant, integrating smaller and denser transistors reduces the cost per function