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基于波导耦合光栅的共振原理和多孔硅的光学传感特性,提出一种含多孔硅层的波导耦合光栅纳米异质结构的折射率传感模型。根据古斯-汉欣(Goos-Hnchen)位移理论和波导耦合光栅共振的相位匹配条件,建立共振波长与待测样本折射率之间的关系模型,并分析了折射率传感结构的折射率传感特性。利用多孔硅高效的承载机制,将其作为待测样本承载单元,选用不同浓度的乙二醇溶液作为待测样本,对该折射率传感结构的灵敏度和品质因数Q进行分析。结果表明,该折射率传感结构对乙二醇溶液的灵敏度为2.2nm/1%,Q值为226,证明了该传感结构的有效性,它可实现对低浓度待测样本的检测。
Based on the resonant principle of waveguide-coupled grating and optical sensing properties of porous silicon, a refractive index sensing model of waveguide-coupled grating nano-heterostructure with porous silicon layer was proposed. According to the Goos-Hänchen displacement theory and the phase matching condition of waveguide-coupled grating resonance, a model of the relationship between the resonant wavelength and the refractive index of the sample to be measured is established, and the refraction of the refractive index sensing structure Rate sensing characteristics. Using porous silicon efficient bearing mechanism as the sample bearing unit, different concentrations of ethylene glycol solution were selected as the sample to be tested, and the sensitivity and quality factor Q of the refractive index sensing structure were analyzed. The results show that the sensitivity of the refractive index sensing structure to ethylene glycol solution is 2.2nm / 1% and the Q value is 226, which proves the effectiveness of the sensing structure. It can realize the detection of low concentration samples.